| 000 | 00560nam a2200193Ia 4500 | ||
|---|---|---|---|
| 001 | 0000001320 | ||
| 008 | 231110s9999 xx 000 0 und d | ||
| 020 | _a140204366x | ||
| 090 | 0 | 0 |
_a537.24 _bDEF _c2006 |
| 245 | 1 | 0 |
_aDefects in high-k gate dielectric stacks _cedited by Evgeni Gusev |
| 260 |
_aDordrecht _bSpringer _cc2006 |
||
| 300 |
_ax,492p.: _bill.; _c25cm |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 1 | 0 | _aSemiconductors |
| 650 | 2 | 0 | _aDEP, DTK |
| 650 | 2 | 0 | _aDielectrics |
| 700 | 1 | _aTitle | |
| 700 | 1 |
_axx, 686 p. _bill. _c24 cm |
|
| 999 |
_c3964 _d3964 |
||