| 000 | 00530nam a2200193Ia 4500 | ||
|---|---|---|---|
| 001 | 0000006170 | ||
| 008 | 231110s9999 xx 000 0 und d | ||
| 020 | _a9748279618 | ||
| 090 |
_a025.431 _bMOR _c1998 _dX |
||
| 100 | _aMortimer, Mary | ||
| 245 | 0 | 0 |
_aFoundations of MEMS _cby Chang Liu |
| 260 |
_aCanberra _bDocMatrix _cc1998 |
||
| 300 |
_a[132]p. _c30cm |
||
| 500 | _aLibrary education series | ||
| 504 | _aIncludes index | ||
| 650 | _aClassification, Dewey decimal | ||
| 700 |
_axx, 686 p. _bill. _c24 cm |
||
| 700 | 0 | _aTitle | |
| 999 |
_c18514 _d18514 |
||