| 000 | 00607nam a2200193Ia 4500 | ||
|---|---|---|---|
| 001 | 0000004581 | ||
| 008 | 231110s9999 xx 000 0 und d | ||
| 020 | _a0471924784 | ||
| 090 | 0 | 0 |
_a621.381 _bMOR _c1990 |
| 100 | 0 | _aMorgan, D. V. | |
| 245 | 0 | 0 |
_aAn introduction to semiconductor microtechnology _cD. V. Morgan, K. Board. |
| 260 |
_aNew York _bJ. Wiley _cc1990. |
||
| 300 |
_axiv, 208 p. _bill. _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 | _aDTK, ANS, DNS, DIP, DIS | |
| 650 | 0 |
_aSemiconductors _xDesign and construction. |
|
| 700 | 0 | _aBoard, K. | |
| 700 | 0 | _aTitle. | |
| 999 |
_c13747 _d13747 |
||