| 000 | 00655nam a2200217Ia 4500 | ||
|---|---|---|---|
| 001 | 0000000391 | ||
| 008 | 231110s9999 xx 000 0 und d | ||
| 020 | _a0131472860 | ||
| 090 | 0 | 0 |
_a621.3 _bLIU _c2006 |
| 100 | 0 | _aLiu, Chang | |
| 245 | 0 | 0 |
_aFoundations of MEMS _cby Chang Liu |
| 260 |
_aUpper Saddle River, New Jersey _bPrentice Hall _cc2006 |
||
| 300 |
_axxii,530p.: _bill. _c24cm |
||
| 500 | _aIncludes index | ||
| 504 | _aIllinois Ece Series | ||
| 504 |
_aTroubleshooting process operations _cNorman P. Lieberman |
||
| 650 | 0 | _aAKM,DKM,DAD,DPU | |
| 650 | 0 | _aMicroelectromechanical systems | |
| 700 |
_axx, 686 p. _bill. _c24 cm |
||
| 700 | 0 | _aTitle | |
| 999 |
_c1177 _d1177 |
||