TY  - BOOK
AU  - Lee,Ki Bang
TI  - PRINCIPLES of Microelectromechanical systems
SN  - 9780470466346 (cloth)
AV  - TK7875 .P75 2011
PY  - 2011///
CY  - Hoboken, N.J.
PB  - WILEY
KW  - DKM
KW  - Microelectromechanical systems
ER  -