PRINCIPLES of Microelectromechanical systems 
edited by Ki Bang Lee. 
 - Hoboken, N.J.  WILEY  c2011. 
 - xii, 667 p.  ill.  25 cm. 
<br/><br/><label>ISBN: </label>9780470466346 (cloth) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>DKM<br/>Microelectromechanical systems.
<br/><br/><label>LC Class. No.: </label>TK7875  / .P75 2011