Micromachining using electrochemical discharge phenomenon fundamentals and applications of spark assisted chemical engraving
Rolf Wuthrich.
- Norwich, NY, USA W. Andrew, 2009
- xiv, 181p. ill. 26cm
- Micro & nano technologies .
Includes bibliographical references.
9780815515876
Micromachining. Electric discharges--Industrial applications. Electrochemical cutting. Plasma etching.