VLSI technology 
edited by S.M. Sze. 
 - 2nd ed. 
 - New York  McGraw-Hill  c1988. 
 - xii, 676 p.  ill.  25 cm. 
<br/><br/> McGraw-Hill series in electrical engineering.|pElectronics and electronic circuits 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0071003479 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Very large scale integration