TY - BOOK AU - Taranath, Bungale S. AU - Title. TI - Slow rarefied flows: theory and application to micro-electro-mechanical systems SN - 0070629145 PY - 1998/// CY - New York PB - McGraw-Hill KW - Building, Iron and steel KW - Concrete construction KW - Structural engineering N1 - Includes bibliographical references (p. 987-989) and index ER -