TY  - BOOK
AU  - Mortimer, Mary
AU  - xx, 686 p.
AU  - Title
TI  - Foundations of MEMS
SN  - 9748279618
PY  - 1998///
CY  - Canberra
PB  - DocMatrix
KW  - Classification, Dewey decimal
N1  - Library education series; Includes index
ER  -