Mortimer, Mary <br/><br/>
Foundations of MEMS 
by Chang Liu 
 - Canberra  DocMatrix  c1998 
 - [132]p.  30cm 
<br/><br/> Library education series 
<br/><br/>Includes index 
<br/><br/><label>ISBN: </label>9748279618 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Classification, Dewey decimal