TY  - BOOK
AU  - Deal, MichaelD.
AU  - Griffin, Peter B.
TI  - SILICON VLSI technology: fundamentals, practice and modeling
SN  - 0130850373
PY  - 2000///
CY  - Upper Saddle River,NJ
PB  - Pearson
KW  - DEM
KW  - Integrated circuits Ixvery large scale integration Ixdesign and construction
KW  - Metal oxide semiconductors
KW  - Silicon oxide films
N1  - Includes index
ER  -