SILICON VLSI technology  fundamentals, practice and modeling 
edited by James D. Plummer...[et al]., 
 - Upper Saddle River,NJ  Pearson  c2000 
 - xiv,817p.:  ill.;  25cm 
<br/><br/>Includes index 
<br/><br/><label>ISBN: </label>0130850373 
<br/><br/><label>Subjects--Topical Terms: </label><br/>DEM<br/>Integrated circuits Ixvery large scale integration Ixdesign and construction<br/>Metal oxide semiconductors<br/>Silicon oxide films