TY - BOOK AU - Cercignani , Carlo AU - xx, 686 p. AU - Title TI - Slow rarefied flows: theory and application to micro-electro-mechanical systems SN - 3764375345 PY - 2006/// CY - Basel PB - Birkhauser KW - DAD,DPU,DKM KW - Kinetic theory of gases KW - Rarefied gas dynamics KW - Statistical mechanics N1 - Includes bibliographical references and index ER -