TY  - BOOK
AU  - Morgan, D. V.
AU  - Board, K.
AU  - Title.
TI  - An introduction to semiconductor microtechnology
SN  - 0471924784
PY  - 1990///
CY  - New York
PB  - J. Wiley
KW  - DTK, ANS, DNS, DIP, DIS
KW  - Semiconductors
KW  - Design and construction
N1  - Includes bibliographical references and index
ER  -