Morgan, D. V. <br/><br/>
An introduction to semiconductor microtechnology 
D. V. Morgan, K. Board. 
 - New York  J. Wiley  c1990. 
 - xiv, 208 p.  ill.  24 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0471924784 
<br/><br/><label>Subjects--Topical Terms: </label><br/>DTK, ANS, DNS, DIP, DIS<br/>Semiconductors--Design and construction.