Micromachining using electrochemical discharge phenomenon fundamentals and applications of spark assisted chemical engraving

Wuthrich, Rolf.

Micromachining using electrochemical discharge phenomenon fundamentals and applications of spark assisted chemical engraving Rolf Wuthrich. - Norwich, NY, USA W. Andrew, 2009 - xiv, 181p. ill. 26cm - Micro & nano technologies .

Includes bibliographical references.

9780815515876


Micromachining.
Electric discharges--Industrial applications.
Electrochemical cutting.
Plasma etching.

TJ1191.5