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Micromechanical photonics

Ukita, H.

Micromechanical photonics H. Ukita - Berlin Springer-Verlag c2006 - xi,250p.: ill.; 25cm

Includes bibliographical references and index

ISBN: 3540313338

Subjects--Topical Terms:
DEP, DTK, DEM
Microelectromechanical systems
Microelectronics
Photonics

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